diff --git a/CMakeLists.txt b/CMakeLists.txt
index 5ef80ffc6f9..ab205795c1c 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -458,10 +458,10 @@ else()
   )
 endif()
 
-configure_file(cmake/script/Coverage.cmake Coverage.cmake COPYONLY)
-configure_file(cmake/script/CoverageFuzz.cmake CoverageFuzz.cmake COPYONLY)
-configure_file(cmake/script/CoverageInclude.cmake.in CoverageInclude.cmake @ONLY)
-configure_file(contrib/filter-lcov.py filter-lcov.py COPYONLY)
+configure_file(cmake/script/Coverage.cmake Coverage.cmake USE_SOURCE_PERMISSIONS COPYONLY)
+configure_file(cmake/script/CoverageFuzz.cmake CoverageFuzz.cmake USE_SOURCE_PERMISSIONS COPYONLY)
+configure_file(cmake/script/CoverageInclude.cmake.in CoverageInclude.cmake USE_SOURCE_PERMISSIONS @ONLY)
+configure_file(contrib/filter-lcov.py filter-lcov.py USE_SOURCE_PERMISSIONS COPYONLY)
 
 # Don't allow extended (non-ASCII) symbols in identifiers. This is easier for code review.
 try_append_cxx_flags("-fno-extended-identifiers" TARGET core_interface SKIP_LINK)
diff --git a/cmake/module/GenerateSetupNsi.cmake b/cmake/module/GenerateSetupNsi.cmake
index b7ea423611f..3c358c54958 100644
--- a/cmake/module/GenerateSetupNsi.cmake
+++ b/cmake/module/GenerateSetupNsi.cmake
@@ -14,5 +14,5 @@ function(generate_setup_nsi)
   set(BITCOIN_WALLET_TOOL_NAME "bitcoin-wallet")
   set(BITCOIN_TEST_NAME "test_bitcoin")
   set(EXEEXT ${CMAKE_EXECUTABLE_SUFFIX})
-  configure_file(${PROJECT_SOURCE_DIR}/share/setup.nsi.in ${PROJECT_BINARY_DIR}/bitcoin-win64-setup.nsi @ONLY)
+  configure_file(${PROJECT_SOURCE_DIR}/share/setup.nsi.in ${PROJECT_BINARY_DIR}/bitcoin-win64-setup.nsi USE_SOURCE_PERMISSIONS @ONLY)
 endfunction()
diff --git a/cmake/module/Maintenance.cmake b/cmake/module/Maintenance.cmake
index 2c6cfc1863c..a232a9fc1eb 100644
--- a/cmake/module/Maintenance.cmake
+++ b/cmake/module/Maintenance.cmake
@@ -92,11 +92,11 @@ function(add_macos_deploy_target)
   if(CMAKE_SYSTEM_NAME STREQUAL "Darwin" AND TARGET bitcoin-qt)
     set(macos_app "Bitcoin-Qt.app")
     # Populate Contents subdirectory.
-    configure_file(${PROJECT_SOURCE_DIR}/share/qt/Info.plist.in ${macos_app}/Contents/Info.plist)
+    configure_file(${PROJECT_SOURCE_DIR}/share/qt/Info.plist.in ${macos_app}/Contents/Info.plist USE_SOURCE_PERMISSIONS)
     file(CONFIGURE OUTPUT ${macos_app}/Contents/PkgInfo CONTENT "APPL????")
     # Populate Contents/Resources subdirectory.
     file(CONFIGURE OUTPUT ${macos_app}/Contents/Resources/empty.lproj CONTENT "")
-    configure_file(${PROJECT_SOURCE_DIR}/src/qt/res/icons/bitcoin.icns ${macos_app}/Contents/Resources/bitcoin.icns COPYONLY)
+    configure_file(${PROJECT_SOURCE_DIR}/src/qt/res/icons/bitcoin.icns ${macos_app}/Contents/Resources/bitcoin.icns USE_SOURCE_PERMISSIONS COPYONLY)
     file(CONFIGURE OUTPUT ${macos_app}/Contents/Resources/Base.lproj/InfoPlist.strings
       CONTENT "{ CFBundleDisplayName = \"@PACKAGE_NAME@\"; CFBundleName = \"@PACKAGE_NAME@\"; }"
     )
diff --git a/doc/CMakeLists.txt b/doc/CMakeLists.txt
index 61a7653e4aa..310a90612bb 100644
--- a/doc/CMakeLists.txt
+++ b/doc/CMakeLists.txt
@@ -6,7 +6,7 @@ find_package(Doxygen COMPONENTS dot)
 
 if(DOXYGEN_FOUND)
   set(doxyfile ${CMAKE_CURRENT_BINARY_DIR}/Doxyfile)
-  configure_file(Doxyfile.in ${doxyfile})
+  configure_file(Doxyfile.in ${doxyfile} USE_SOURCE_PERMISSIONS)
 
   # In CMake 3.27, The FindDoxygen module's doxygen_add_docs()
   # command gained a CONFIG_FILE option to specify a custom doxygen
diff --git a/src/CMakeLists.txt b/src/CMakeLists.txt
index d6fa21d7667..4fe3793b81e 100644
--- a/src/CMakeLists.txt
+++ b/src/CMakeLists.txt
@@ -5,7 +5,7 @@
 include(GNUInstallDirs)
 include(AddWindowsResources)
 
-configure_file(${PROJECT_SOURCE_DIR}/cmake/bitcoin-config.h.in config/bitcoin-config.h @ONLY)
+configure_file(${PROJECT_SOURCE_DIR}/cmake/bitcoin-config.h.in config/bitcoin-config.h USE_SOURCE_PERMISSIONS @ONLY)
 include_directories(${CMAKE_CURRENT_BINARY_DIR} ${CMAKE_CURRENT_SOURCE_DIR})
 
 # TODO: After the transition from Autotools to CMake, the obj/ subdirectory
diff --git a/src/qt/CMakeLists.txt b/src/qt/CMakeLists.txt
index 19698d75cfc..297408a926b 100644
--- a/src/qt/CMakeLists.txt
+++ b/src/qt/CMakeLists.txt
@@ -46,7 +46,7 @@ file(GLOB ts_files RELATIVE ${CMAKE_CURRENT_SOURCE_DIR} locale/*.ts)
 set_source_files_properties(${ts_files} PROPERTIES OUTPUT_LOCATION ${CMAKE_CURRENT_BINARY_DIR}/locale)
 qt5_add_translation(qm_files ${ts_files})
 
-configure_file(bitcoin_locale.qrc bitcoin_locale.qrc COPYONLY)
+configure_file(bitcoin_locale.qrc bitcoin_locale.qrc USE_SOURCE_PERMISSIONS COPYONLY)
 
 # The bitcoinqt sources have to include headers in
 # order to parse them to collect translatable strings.
diff --git a/test/CMakeLists.txt b/test/CMakeLists.txt
index 9fd4e6e84ea..3a5998697d4 100644
--- a/test/CMakeLists.txt
+++ b/test/CMakeLists.txt
@@ -27,7 +27,7 @@ function(create_test_config)
   set_configure_variable(ENABLE_EXTERNAL_SIGNER ENABLE_EXTERNAL_SIGNER)
   set_configure_variable(WITH_USDT ENABLE_USDT_TRACEPOINTS)
 
-  configure_file(config.ini.in config.ini @ONLY)
+  configure_file(config.ini.in config.ini USE_SOURCE_PERMISSIONS @ONLY)
 endfunction()
 
 create_test_config()